Micro Electro Mechanical Systems (MEMS)

We are poised in a revolution of microelectronics, which has dramatically reduced the cost and increased the capability of electronics. This has given much potential to prosper in the area of micro mechanics encompassing MEMS (Micro Electro Mechanical Systems). MEMS promises to revolutionize nearly every product category by bringing together silicon based microelectronics with micro machining technology, making possible the realization of complete systems on a chip. You can also Subscribe to FINAL YEAR PROJECT'S by Email for more such projects and seminar.


The paper outlines the fabrication techniques, benefits, applications and challenges of MEMS. MEMS, often referred to as micro systems technology, are fabricated using modified silicon and non-silicon fabrication technology.

It reduces cost and increases reliability of the system. MEMS- scale accelerometers, geophones and gyros are replacing some of the standard size precursors and are establishing new markets of their own.

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Commercial applications are inertial sensors, Power MEMS and RF switches. This technology is also used in industrial, consumer and auto motive marketing.

Micro electromechanical systems (MEMS) is a technology of miniaturization that has been largely adopted from the integrated circuit (IC) industry and applied to the miniaturization of all systems not only electrical systems but also mechanical, optical, fluid, magnetic, etc.

Micro Electro-mechanical systems or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micron-scale equivalent that can be produced in large quantities by fabrication processes used in integrated circuits photolithography.

MEMS is an emerging technology which will rapidly revolutionize all the fields in the near future, if the level of fabrication knowledge of current designer of MEMS devices and the packaging techniques are still improved. Use this report for your reference and study work.

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